====== axcelis ======

{{ map-axcelis.svg?100|NanoLab map showing axcelis location}}

[[https://docs.google.com/document/d/1StcNOZTKQ3Xan3IiQ-8vrpcKEiYlqHNVdlkljzTYJ38/edit?usp=sharing|NanoLab axcelis manual]]

axcelis is a UV hardbake oven that uses ultraviolet light and heat to hardbake photoresist extremely quickly (within about 30 seconds).