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====== axcelis ====== {{ map-axcelis.svg?100|NanoLab map showing axcelis location}} [[https://docs.google.com/document/d/1StcNOZTKQ3Xan3IiQ-8vrpcKEiYlqHNVdlkljzTYJ38/edit?usp=sharing|NanoLab axcelis manual]] axcelis is a UV hardbake oven that uses ultraviolet light and heat to hardbake photoresist extremely quickly (within about 30 seconds).