Warning: curl_exec() has been disabled for security reasons in /services/http/users/b/bamlab/wp-content/plugins/wordfence/vendor/wordfence/wf-waf/src/lib/http.php on line 360

Warning: curl_exec() has been disabled for security reasons in /services/http/users/b/bamlab/wp-content/plugins/wordfence/vendor/wordfence/wf-waf/src/lib/http.php on line 360
====== cha ====== {{ map-cha.svg|NanoLab map showing cha location}} [[https://docs.google.com/document/d/1RAwxAD7kOLh9HgNd_HICKrMTNw4xvVO0Y-zNleuDcHE/edit?usp=sharing|NanoLab cha manual]] cha is a multi-material e-beam evaporator. It holds three wafers (or chips) at once in a rotating planetary mount. We often use it to deposit chromium and gold. This is the standard evaporator for the NanoLab. A good backup is ebeam1, which has extremely similar capabilities (save cha's fancy but optional automatic deposition rate controller). {{cha.jpg?0x200 |picture of cha tool}} ===== Process Notes ===== ^ Date ^ Person ^ Data ^ | 22 Oct 2020 | Daniel | Tool power supply is replaced and is more powerful; processes should be recalibrated. | | 21 May 2021 | Daniel | Cr evaporates at about 25mA (45% LOW beam power). Au evaporates at about 40mA (60% LOW beam power). | | 12 Jul 2021 | Daniel | Ti evaporates at about 65mA (36% MID beam power). Pt evaporates at about 170mA (51% MID beam power). Both are extremely bright and heat the wafer significantly. | | 12 Jul 2021 | Daniel | 11nm Ti + 70nm Pt on standard 2um MiR701 makes photoresist start to flake/reticulate; more causes cracking. Liftoff works but barely. |