====== MEMS ====== A list of common MEMS components and effects that can be used in microrobots, and theory equations. [[springs]] ===== Stress ===== ===== Resonators ===== ===== Microfabrication ===== ===== Hinges ===== ===== Accelerometer ===== ===== DMD ===== ===== Inkjet Head ===== ===== Heat Transfer ===== ===== What is MEMS? ===== For people new to the group, etc.