====== Microfabrication ======

This page is an overview of microfabrication techniques used to make microrobots. It should act as a cheat sheet, listing equations, materials data, etch rates, etc., but can often link to specific nanolab tool pages.

===== Photolithography =====

Masks vs direct write. Limits on resolution. Rules of thumb. Use gcaws6, mla150 in nanolab.

===== Evaporation =====

Anisotropic deposition. Low temperature. Adhesion layers. Use cha in nanolab.

===== Photoresist =====

Fundamental step. Spin vs. spray. Spin speed / thickness dependence. Types of photoresist (SU-8 microfluidics). picotrack in nanolab.

===== RIE and DRIE =====

Anisotropic etch. Silicon vs. other materials. Etch rates. Undercut. Annealing tricks.

===== Sputtering =====

===== ALD =====

===== Wet Etch =====

===== Electroplating =====

===== 2-Photon Lithography =====

Nanoscale 3D printing!

===== Materials =====

Gold contaminates. Ruthenium oxide is conductive.

===== What is Microfabrication? =====

For people who haven't taken a MEMS or microfabrication course and/or are new to the group.