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====== Marvell NanoLab ====== The [[https://nanolab.berkeley.edu/|Marvell NanoLab]] is a shared microfabrication facility on the UC Berkeley campus. We build most of our robots here. The following pages should contain information any of us working in the NanoLab could use: equipment calibration data, lists of shared lab resources (e.g., wafers), etc. ===== Tool Notes ===== * [[asap-liftoff|asap-liftoff automatic liftoff tool]] * [[ast-sputter|ast-sputter sputterer]] * [[axcelis|axcelis UV hardbake oven]] * [[cha|cha metal evaporator]] * [[disco|disco dicing saw]] * [[irscope|irscope microscope with IR illumination to see through Si wafers]] * [[keyence|keyence microscope]] * [[mla150|mla150 maskless exposure tool]] * [[olympus|olympus 3D confocal microscope]] * [[optical-microscopes|optical microscopes]] * [[picotrack|picotrack1/2 automatic photoresist application and develop tool]] * [[primaxx|primaxx HF vapor etcher]] * [[primeoven|primeoven HMDS priming tool]] * [[ptherm|ptherm all-purpose plasma etcher]] * [[sts2|sts2 silicon DRIE etcher]] ===== Recipes ===== * [[recipe-liftoff|liftoff process]] * [[sts2|DRIE silicon etch process (for sts2)]] ===== Equipment ===== * [[wafers|list of blank wafers on our group's nanolab shelf, wafer ordering...]] * [[masks|mask ordering information]] * [[wafers|wafer ordering information]] ===== Processes ===== Standard fabrication processes and design rules. * [[soi-process|550-2-40 SOI process]]