====== Marvell NanoLab ======

The [[https://nanolab.berkeley.edu/|Marvell NanoLab]] is a shared microfabrication facility on the UC Berkeley campus. We build most of our robots here.

The following pages should contain information any of us working in the NanoLab could use: equipment calibration data, lists of shared lab resources (e.g., wafers), etc.

===== Tool Notes =====

  * [[asap-liftoff|asap-liftoff automatic liftoff tool]]
  * [[ast-sputter|ast-sputter sputterer]]
  * [[axcelis|axcelis UV hardbake oven]]
  * [[cha|cha metal evaporator]]
  * [[disco|disco dicing saw]]
  * [[irscope|irscope microscope with IR illumination to see through Si wafers]]
  * [[keyence|keyence microscope]]
  * [[mla150|mla150 maskless exposure tool]]
  * [[olympus|olympus 3D confocal microscope]]
  * [[optical-microscopes|optical microscopes]]
  * [[picotrack|picotrack1/2 automatic photoresist application and develop tool]]
  * [[primaxx|primaxx HF vapor etcher]]
  * [[primeoven|primeoven HMDS priming tool]]
  * [[ptherm|ptherm all-purpose plasma etcher]]
  * [[sts2|sts2 silicon DRIE etcher]]

===== Recipes =====

  * [[recipe-liftoff|liftoff process]]
  * [[sts2|DRIE silicon etch process (for sts2)]]

===== Equipment =====

  * [[wafers|list of blank wafers on our group's nanolab shelf, wafer ordering...]]
  * [[masks|mask ordering information]]
  * [[wafers|wafer ordering information]]

===== Processes =====

Standard fabrication processes and design rules.

  * [[soi-process|550-2-40 SOI process]]