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--- cha [2021/07/13 22:13]
dteal [Process Notes]
+++ cha [2021/11/21 17:36] (current)
dteal
@@ Line 5: / Line 5: @@
 [[https://docs.google.com/document/d/1RAwxAD7kOLh9HgNd_HICKrMTNw4xvVO0Y-zNleuDcHE/edit?usp=sharing|NanoLab cha manual]]
-cha is a multi-material e-beam evaporator. It holds three wafers at once in a rotating planetary mount. We often use it to deposit chromium and gold.
+cha is a multi-material e-beam evaporator. It holds three wafers (or chips) at once in a rotating planetary mount. We often use it to deposit chromium and gold. This is the standard evaporator for the NanoLab. A good backup is ebeam1, which has extremely similar capabilities (save cha's fancy but optional automatic deposition rate controller).
 {{cha.jpg?0x200 |picture of cha tool}}

Berkeley Autonomous Microsystems Lab