https://bamlab.berkeley.edu/wiki/ 2026-04-11T16:45:18+00:00 https://bamlab.berkeley.edu/wiki/ https://bamlab.berkeley.edu/wiki/_media/wiki/favicon.ico text/html 2022-05-16T16:26:25+00:00 dteal (dteal@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/soi-process?rev=1652743585&do=diff 550-2-40um SOI Process This is our group's standard fabrication process for robotic mechanisms (as of 2021). SOI Wafer We start with SOI wafers purchased from an external vendor (e.g., in the past, we've ordered from SVM). These are 150mm diameter with a 40um frontside, 2um buried oxide (BOX), and 550um backside (substrate). The silicon (both frontside and substrate) is P/boron doped to 15 to 20 ohm-cm. The wafer surfaces (front and back) should have standard <100> orientation with a single … text/html 2022-03-04T09:59:25+00:00 lydialee (lydialee@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/span_ion?rev=1646416765&do=diff The Solar Probe Analyzer for Ions (SPAN-Ion) Keywords: space, mass spectrometry, electrostatic analyzer, solar wind Objectives: A Hierarchy * Space Agencies: Improve our understanding of the formation and transport of the solar wind and plasma to protect astronauts and hardware text/html 2022-03-04T09:58:39+00:00 lydialee (lydialee@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/about/onboarding?rev=1646416719&do=diff Onboarding Welcome to the Pister group! Sorry, we're still working on this page, but for the moment: * Come to our group meetings! * Talk to any one of us to see our research! A list of current group members is here. * Lab access is a bit difficult during COVID, but eventually you should get: text/html 2022-03-04T09:57:30+00:00 lydialee (lydialee@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/about/meetings?rev=1646416650&do=diff Weekly Meetings Our group has several meetings during the week. In addition to a main group meeting, there are several other meetings that focus on particular projects or areas so they can be discussed in more depth than during the main group meeting. text/html 2021-12-09T23:13:47+00:00 dteal (dteal@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/ast-sputter?rev=1639120427&do=diff ast-sputter NanoLab ast-sputter manual ast-sputter is a general-purpose sputtering tool capable of sputtering up to two materials at once, with Ar and optional O2/N2 process gas, onto a single heated 6“ platen (that can hold chips or a wafer). This is the most commonly used sputterer in the Nanolab. text/html 2021-12-03T17:32:10+00:00 dteal (dteal@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/?image=bamlab_40umtrench_layers.lyp&ns=&rev=1638581530&tab_details=history&mediado=diff&do=media text/html 2021-12-03T01:23:26+00:00 dteal (dteal@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/primaxx?rev=1638523406&do=diff primaxx NanoLab primaxx manual primaxx is an HF vapor etching tool. We use it to remove SiO2 from MEMS devices without the stiction issues caused by using a liquid etch. [picture of primaxx tool] Process Notes Date Person Data 3 Feb 2021 Daniel Using RECIPE5 (the fastest etch available; I don't see a need for a slower one here) to release SOI structures. Vary etch time as desired for given etch distance (and the tool manual recommends etch cycles of at least 5 minutes each and ideally … text/html 2021-11-30T17:36:02+00:00 dteal (dteal@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/mla150?rev=1638322562&do=diff mla150 NanoLab mla150 manual mla150 is a maskless exposure tool. It can expose photoresist to 0.6um resolution on almost any size wafer with both frontside and backside alignment. Because no mask is required, unlike traditional photolithography tools, photoresist can be exposed half an hour after designing a layout. This also allows patterning gigantic features the size of the entire wafer with micron resolution. Exposing a 6 text/html 2021-11-21T17:50:07+00:00 dteal (dteal@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/wafers?rev=1637545807&do=diff Wafer Ordering In the past, we've ordered custom SOI wafers 25 at a time from Silicon Valley Microelectronics (https://svmi.com/) with the following specifications: Device Layer: Diameter: 150mm ±0.5mm Thickness: 40um ±1um Type/Dopant: P/Boron Device Resistivity: 15-25 ohm-cm Crystal Orientation: <100> ±0.5 degree Front Side Finish: Polished Primary Flat Orientation: <110> ± 1 degree BOX: Thickness: 2um ±0.1um Handle Layer: Resistivity: 15-25 ohm-cm Thi… text/html 2021-11-21T17:45:46+00:00 dteal (dteal@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/nanolab?rev=1637545546&do=diff Marvell NanoLab The Marvell NanoLab is a shared microfabrication facility on the UC Berkeley campus. We build most of our robots here. The following pages should contain information any of us working in the NanoLab could use: equipment calibration data, lists of shared lab resources (e.g., wafers), etc. text/html 2021-11-21T17:45:07+00:00 dteal (dteal@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/optical-microscopes?rev=1637545507&do=diff optical microscopes NanoLab optical microscopes manual There are several regular optical microscopes in the NanoLab. Alternatively, the olympus 3D confocal microscope can act as a very good optical microscope with computer control and the ability to automatically stitch images over an area (or do the same thing with a 3D depth scan), and the text/html 2021-11-21T17:38:32+00:00 dteal (dteal@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/irscope?rev=1637545112&do=diff irscope irscope is a microscope with a computer-connected camera sensitive to both visible and infrared light. The microscope has visible light illumination for the top side of the sample, and infrared for the back. This can be used to look through silicon wafers. text/html 2021-11-21T17:22:02+00:00 dteal (dteal@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/?image=map-ast-sputter.svg&ns=&rev=1637544122&tab_details=history&mediado=diff&do=media text/html 2021-11-18T18:00:02+00:00 dteal (dteal@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/?image=irscope-farside-layout.png&ns=&rev=1637287202&tab_details=history&mediado=diff&do=media <img src="https://bamlab.berkeley.edu/wiki/_media/irscope-farside-layout.png?w=500&h=281&t=1637287202&amp;tok=54abbe" alt="irscope-farside-layout.png" /> text/html 2021-11-18T17:42:38+00:00 dteal (dteal@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/?image=irscope.jpg&ns=&rev=1637286158&tab_details=history&mediado=diff&do=media <img src="https://bamlab.berkeley.edu/wiki/_media/irscope.jpg?w=500&h=375&t=1637286158&amp;tok=27eb63" alt="irscope.jpg" /> text/html 2021-11-18T17:42:38+00:00 dteal (dteal@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/?image=irscope-nearsurface.jpg&ns=&rev=1637286158&tab_details=history&mediado=diff&do=media <img src="https://bamlab.berkeley.edu/wiki/_media/irscope-nearsurface.jpg?w=500&h=281&t=1637286158&amp;tok=64f97a" alt="irscope-nearsurface.jpg" /> text/html 2021-11-18T17:42:38+00:00 dteal (dteal@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/?image=irscope-farsurface.jpg&ns=&rev=1637286158&tab_details=history&mediado=diff&do=media <img src="https://bamlab.berkeley.edu/wiki/_media/irscope-farsurface.jpg?w=500&h=281&t=1637286158&amp;tok=9e606d" alt="irscope-farsurface.jpg" /> text/html 2021-11-18T17:37:50+00:00 dteal (dteal@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/?image=map-irscope.svg&ns=&rev=1637285870&tab_details=history&mediado=diff&do=media text/html 2021-10-01T18:46:47+00:00 lydialee (lydialee@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/?image=swarm_surfacemountsoldering_pickandplace.pptx&ns=&rev=1633139207&tab_details=history&mediado=diff&do=media text/html 2021-07-23T12:00:59+00:00 dteal (dteal@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/?image=render-jumper-extended.png&ns=&rev=1627066859&tab_details=history&mediado=diff&do=media <img src="https://bamlab.berkeley.edu/wiki/_media/render-jumper-extended.png?w=500&h=281&t=1627066859&amp;tok=5c5ad3" alt="render-jumper-extended.png" />