https://bamlab.berkeley.edu/wiki/ 2026-04-29T14:13:00+00:00 https://bamlab.berkeley.edu/wiki/ https://bamlab.berkeley.edu/wiki/_media/wiki/favicon.ico text/html 2021-07-13T22:51:05+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/2d_design?rev=1626241865&do=diff 2D Design and Layout Software We use 2D design and layout software to make the final designs for fabrication in the Marvell NanoLab. Microfabrication typically consists of a number of steps applied to a flat silicon wafer, where each step affects the surface in some two-dimensional way. Thus most designs are 2D geometry (for 3D robots, we break the robots apart into several flat 2D parts, construct the flat 2D parts, and assemble them into 3D afterward). A second reason most microfabrication de… text/html 2021-07-23T16:10:22+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/3d_design?rev=1627081822&do=diff 3D Design Software Although the final robots designs are usually edited in a 2D layout editor due to their complexity, it is often extremely useful to begin design in a 3D CAD software for mechanical engineering before exporting to 2D. These CAD programs usually have many more options for creating complex 2D (and 3D) shapes, dimensioning them, and changing single dimensions and having the rest of the design update around them. text/html 2020-11-30T07:31:55+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/actuators?rev=1606750315&do=diff Microrobot Actuators Inchworm Motors See the inchworm motor page. Springs See springs. Gap-Closing Actuators Basic MEMS structure. Comb Drive Basic MEMS structure. Piezoelectrics Shape Memory Alloy External Actuation Magnetic field, optical tweezers. text/html 2020-11-30T06:32:07+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/architecture?rev=1606746727&do=diff Microrobot Architecture Start with: * microcontroller * power source * actuators * sensors * frame Combine into robot! Actuators See actuators. Built with MEMS ideas via microfabrication. Frame Often the same silicon chips the actuators are built on. text/html 2021-11-21T17:34:05+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/asap-liftoff?rev=1637544845&do=diff asap-liftoff NanoLab asap-liftoff manual asap-liftoff automatically dissolves and removes photoresist and any metals deposited on top to complete a liftoff process. We often use it while patterning gold. Process Notes Date Person Data 10 Sep 2020 Daniel Recipe 17 (high intensity 6 text/html 2020-11-30T07:31:54+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/assembly?rev=1606750314&do=diff Microrobot Assembly The final step---assembling individual components into a functional microrobot---is also difficult. Epoxy ZIF socket IC packaging Fluidic Assembly Pick and Place PCB text/html 2021-12-09T23:13:47+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/ast-sputter?rev=1639120427&do=diff ast-sputter NanoLab ast-sputter manual ast-sputter is a general-purpose sputtering tool capable of sputtering up to two materials at once, with Ar and optional O2/N2 process gas, onto a single heated 6“ platen (that can hold chips or a wafer). This is the most commonly used sputterer in the Nanolab. text/html 2021-02-07T20:04:21+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/axcelis?rev=1612757061&do=diff axcelis NanoLab axcelis manual axcelis is a UV hardbake oven that uses ultraviolet light and heat to hardbake photoresist extremely quickly (within about 30 seconds). text/html 2021-02-20T07:51:37+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/bliss?rev=1613836297&do=diff Berkeley Low-Cost Interplanetary Solar Sail (BLISS) We propose to build and launch a fleet of thousands of autonomous ten-gram spacecraft to navigate the inner solar system. Example missions of these low-cost spacecraft will be to return visual images of near-earth objects (NEOs), create an interplanetary mesh network for data communications, deploy micro robots on NEOs, drop phosphine sensors into the atmosphere of Venus, and return samples from comets. Each spacecraft will weigh roughly ten … text/html 2021-02-07T20:32:37+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/bsac?rev=1612758757&do=diff BSAC BSAC, the Berkeley Sensor & Actuator Center, is a UC Berkeley research organization our group is part of. text/html 2021-11-21T17:36:36+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/cha?rev=1637544996&do=diff cha NanoLab cha manual cha is a multi-material e-beam evaporator. It holds three wafers (or chips) at once in a rotating planetary mount. We often use it to deposit chromium and gold. This is the standard evaporator for the NanoLab. A good backup is ebeam1, which has extremely similar capabilities (save cha's fancy but optional automatic deposition rate controller). text/html 2020-11-30T06:46:28+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/control?rev=1606747588&do=diff Microrobot Control Microcontrollers SCuM Communication Radio, laser Algorithms Control schemes for individual microrobots or gigantic swarms. text/html 2021-07-13T22:31:45+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/disco?rev=1626240705&do=diff disco NanoLab disco manual disco is a wafer dicing saw. We have used it to dice glass wafers but have had trouble dicing MEMS devices without breaking them. Process Notes Date Person Data 16 Sep 2020 Daniel Glass cutting blade cracks 0.7mm thick borofloat wafer and runs into chuck (bad!) at the current nanolab-manual-recommended speed of 1mm/s. Cuts at 0.25mm/s work much better. text/html 2020-11-30T06:32:00+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/encyclopedia?rev=1606746720&do=diff Microrobot Encyclopedia The following pages describe the theoretical parts and fabrication methods used to make microrobots. Previously, this knowledge existed as a series of MEMS classes, microfabrication classes, and a whole bunch of specialist knowledge in papers and graduate students' brains. Here it's written out explicitly in one place for easy reference. text/html 2021-02-20T08:00:21+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/fiber_crawler?rev=1613836821&do=diff MEMS Fiber Crawler Pushing, walking, jumping, and flying microrobots have been demonstrated. Other previous work has demonstrated microelectromechanical systems (MEMS) capable of creating silicon silk, as well as microrobots capable of assembling millimeter-scale carbon fibers. However, microrobots capable of manipulating very small diameter filaments, fibers, and wires initially external to themselves is still an area of open research. We have successfully demonstrated a silicon-on-insulator (… text/html 2020-11-30T07:03:26+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/hardware?rev=1606748606&do=diff Hardware Tools The following pages list the lab spaces and physical tools we have available for building microrobots. text/html 2020-11-30T06:30:24+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/hexapod?rev=1606746624&do=diff MEMS Hexapod text/html 2021-02-19T13:07:28+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/home?rev=1613768848&do=diff Welcome to the Pister group wiki! We're figuring out how to build microrobots and related technology. ---------- About this Site This wiki is where our research group shares: * research project information (SCμM and Zappy pinouts and basic usage) text/html 2020-11-30T06:28:33+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/ic_design?rev=1606746513&do=diff IC Design Software We use Cadence for IC design, e.g., for SCuM. text/html 2020-11-30T07:00:56+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/ic_services?rev=1606748456&do=diff IC Manufacturing Services TSMC Muse semiconductor tapeout to TSMC Quik-Pak IC packaging PolyMUMPs, etc. text/html 2020-11-30T06:30:28+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/inchworm_motor?rev=1606746628&do=diff Electrostatic Inchworm Motor (put description of inchworm motor here) (voltage vs. current vs. power characteristics, etc.) text/html 2020-11-30T06:30:24+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/ionocraft?rev=1606746624&do=diff MEMS Ionocraft text/html 2021-11-21T17:38:32+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/irscope?rev=1637545112&do=diff irscope irscope is a microscope with a computer-connected camera sensitive to both visible and infrared light. The microscope has visible light illumination for the top side of the sample, and infrared for the back. This can be used to look through silicon wafers. text/html 2020-11-30T06:28:34+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/jacobs?rev=1606746514&do=diff Jacobs Hall Jacobs Hall is a campus makerspace with a large number of workshop tools (3D printers, laser cutters, hand tools...) any student can use after obtaining a maker pass. During any given semester, we usually have several graduate students with a research maker pass. text/html 2020-11-30T07:31:09+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/mems?rev=1606750269&do=diff MEMS A list of common MEMS components and effects that can be used in microrobots, and theory equations. springs Stress Resonators Microfabrication Hinges Accelerometer DMD Inkjet Head Heat Transfer What is MEMS? For people new to the group, etc. text/html 2020-11-30T11:02:28+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/mems_gripper?rev=1606762948&do=diff MEMS Gripper Project We began building MEMS grippers in early 2019 as part of the DARPA SHRIMP program. SRI International won a DARPA SHRIMP grant to build a centimeter-cube-size robot that could compete in a series of microrobot “olympics” challenges (e.g., lifting and stacking weights), and our group was subcontracted to build a gripper: tiny robot hands (SRI would build the remainder of the robot). text/html 2020-11-30T06:53:35+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/microfabrication?rev=1606748015&do=diff Microfabrication This page is an overview of microfabrication techniques used to make microrobots. It should act as a cheat sheet, listing equations, materials data, etch rates, etc., but can often link to specific nanolab tool pages. Photolithography text/html 2021-11-30T17:36:02+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/mla150?rev=1638322562&do=diff mla150 NanoLab mla150 manual mla150 is a maskless exposure tool. It can expose photoresist to 0.6um resolution on almost any size wafer with both frontside and backside alignment. Because no mask is required, unlike traditional photolithography tools, photoresist can be exposed half an hour after designing a layout. This also allows patterning gigantic features the size of the entire wafer with micron resolution. Exposing a 6 text/html 2021-11-21T17:45:46+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/nanolab?rev=1637545546&do=diff Marvell NanoLab The Marvell NanoLab is a shared microfabrication facility on the UC Berkeley campus. We build most of our robots here. The following pages should contain information any of us working in the NanoLab could use: equipment calibration data, lists of shared lab resources (e.g., wafers), etc. text/html 2021-11-21T17:45:07+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/optical-microscopes?rev=1637545507&do=diff optical microscopes NanoLab optical microscopes manual There are several regular optical microscopes in the NanoLab. Alternatively, the olympus 3D confocal microscope can act as a very good optical microscope with computer control and the ability to automatically stitch images over an area (or do the same thing with a 3D depth scan), and the text/html 2021-07-23T16:28:08+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/pcb_design?rev=1627082888&do=diff PCB Design Software We usually use either Altium or KiCad to design PCBs. KiCad KiCad is free, open source, and available here. text/html 2021-07-13T22:24:24+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/picotrack?rev=1626240264&do=diff picotrack1/2 NanoLab picotrack1 manual NanoLab picotrack2 manual picotrack1 and picotrack2 are robotic photoresist application and development tools. Using these is the preferred photoresist deposition method for 6“ wafers and standard photoresists (svgcoat/dev6 are often used as a backup, and headway is used for other substrate sizes or specialty photoresists). Each can apply photoresist automatically on a full cassette of wafers. text/html 2020-11-30T06:30:29+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/power?rev=1606746629&do=diff Microrobot Power Battery Solar Tethers text/html 2021-12-03T01:23:26+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/primaxx?rev=1638523406&do=diff primaxx NanoLab primaxx manual primaxx is an HF vapor etching tool. We use it to remove SiO2 from MEMS devices without the stiction issues caused by using a liquid etch. [picture of primaxx tool] Process Notes Date Person Data 3 Feb 2021 Daniel Using RECIPE5 (the fastest etch available; I don't see a need for a slower one here) to release SOI structures. Vary etch time as desired for given etch distance (and the tool manual recommends etch cycles of at least 5 minutes each and ideally … text/html 2021-07-13T22:34:58+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/primeoven?rev=1626240898&do=diff primeoven NanoLab primeoven manual primeoven is an HMDS vapor prime oven. It is the most reliable way to deposit HMDS in the NanoLab, and can be used if the HMDS priming in picotrack1 or the HMDS box at msink3 are insufficient. Date Person Data 21 Jun 2020 Daniel Recipe 2 (much faster than recipe 11) seems to give sufficient adhesion of standard 2um MiR701 to fused silica wafer for liftoff process. Adhesion not quantified. text/html 2021-10-01T15:52:28+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/projects?rev=1633128748&do=diff Group Projects We have many different projects in progress or completed. In progress: * SCuM * Ionocraft * MEMS gripper * Quadrupedal Walker Robot * Self-Righting Actuators * Berkeley Low-Cost Interplanetary Solar Sail * MEMS Micro Rocket * MEMS Fiber Crawler * Solar Probe Analyzer for Ions (SPAN-Ion) Previous projects: * Hexapod text/html 2021-02-10T00:17:31+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/ptherm?rev=1612945051&do=diff ptherm NanoLab ptherm manual ptherm is a multi-purpose plasma etcher. It's the NanoLab's etcher of last resort with virtually no contamination restrictions. We often use it to etch photoresist off devices with gold because gold is not allowed in most of the other plasma etchers (gold is allowed in yes-g500, but that tool generally etches very slowly). text/html 2021-07-13T22:45:54+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/recipe-liftoff?rev=1626241554&do=diff Liftoff Recipe Liftoff patterning is the standard way to pattern materials that are difficult to etch (e.g., the noble metals Au, Pt). * Expose and develop photoresist. A special liftoff resist is available on svgcoat3 or headway. * Evaporate or sputter metal on top. text/html 2021-07-23T13:07:09+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/rendering?rev=1627070829&do=diff Rendering Rendering is making a near-photorealistic picture of a 3D design, like CGI in movies. Here's an example render of a jumping robot prototype: In the past, we've finished a microrobot design in a 2D layout tool, extruded the 2D layers into 3D geometry and saved it in the STL 3D file format, then used the free and open source program Blender to render the STL file. We have a video tutorial on how to do this here: text/html 2020-11-30T06:30:25+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/scum?rev=1606746625&do=diff Single Chip MicroMote (SCμM) See <http://www.crystalfree.org> The Single Chip MicroMote (SCμM for short) is a custom 2x3mm chip with crystal-free radio and ARM Cortex M0 microcontroller capable of full wireless communication (802.15.4 and Bluetooth) with only power, ground, and antenna connections, designed to be a compact microrobot control system or wireless sensor network node. An IR photodiode enables optical programming and HTC Vive Lighthouse-based position sensing with centimeter-scale … text/html 2021-02-20T07:52:04+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/self_righting?rev=1613836324&do=diff Self-Righting Actuators The long-range goals for this project are to demonstrate autonomous self-righting for a microrobot system. This will serve as a platform for self-righting to be integrated in various types of microsystems. text/html 2020-11-30T06:30:29+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/sensors?rev=1606746629&do=diff Microrobot Sensors Camera Photodiode IMU Contact Sensor text/html 2021-10-01T18:43:53+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/sidebar?rev=1633139033&do=diff Meta * Home * Sidebar * How to Use This Wiki About the Group * Members * Weekly Meetings * Onboarding * BSAC Projects * SCμM * MEMS gripper * SPAN-Ion Microrobot Encyclopedia * System Architecture * Control * Actuators * Sensors * Power * Assembly * Microfabrication * MEMS Hardware Tools * Swarm Lab * Marvell NanoLab * Jacobs Hall * IC Services Software Tools * 2D Layout/Design * IC Design * PCB Design * 3D Design * Rendering *… text/html 2021-07-23T12:47:47+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/simulation?rev=1627069667&do=diff Computer Simulation Computer simulation is using software to model how a complex structure (2D or 3D geometry, etc) acts under given physics, e.g., the precise way a complex spring shape bends under a given force, or 3D heat transfer, or the electric field around some geometry. text/html 2021-07-23T16:35:01+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/software?rev=1627083301&do=diff Software Tools Our group uses a large amount of software to design, simulate, and operate robots. The following pages list the specific software we use / have available, and tips and instructions on how to use it. * 2D Layout/Design: layers of 2D shapes ready for microfabrication. text/html 2022-05-16T16:26:25+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/soi-process?rev=1652743585&do=diff 550-2-40um SOI Process This is our group's standard fabrication process for robotic mechanisms (as of 2021). SOI Wafer We start with SOI wafers purchased from an external vendor (e.g., in the past, we've ordered from SVM). These are 150mm diameter with a 40um frontside, 2um buried oxide (BOX), and 550um backside (substrate). The silicon (both frontside and substrate) is P/boron doped to 15 to 20 ohm-cm. The wafer surfaces (front and back) should have standard <100> orientation with a single … text/html 2022-03-04T09:59:25+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/span_ion?rev=1646416765&do=diff The Solar Probe Analyzer for Ions (SPAN-Ion) Keywords: space, mass spectrometry, electrostatic analyzer, solar wind Objectives: A Hierarchy * Space Agencies: Improve our understanding of the formation and transport of the solar wind and plasma to protect astronauts and hardware text/html 2020-11-30T07:31:55+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/springs?rev=1606750315&do=diff Springs For a cantilever: $$\delta_{max}=\frac{FL^3}{3EI}$$ For a rectangular cross-section: $$I=\frac{h^3b}{12}$$ text/html 2021-11-18T14:40:38+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/sts2?rev=1637275238&do=diff sts2 NanoLab sts2 manual sts2 is a silicon DRIE etcher. We use it to etch 40um and 550um trenches in silicon. It sits to the left of the near-identical sts-oxide tool, an ICP etcher for SiO2. [picture of sts2 and sts-oxide tools] Etch Recipes Shallow DRIE Etch For Si etching down to perhaps 40um deep. text/html 2021-10-01T18:50:43+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/swarm_lab?rev=1633139443&do=diff Swarm Lab The Swarm Lab is a large research space we share with several other research groups on the 4th floor of Cory Hall. It contains our desks, meeting rooms, a kitchen, and several large lab rooms. (map of Swarm Lab, with our group and other groups marked, immersion room, etc.) text/html 2020-11-21T23:36:25+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/syntax?rev=1606030585&do=diff BAMLAB Wiki Syntax MathJax (LaTeX math support): https://www.dokuwiki.org/plugin:mathjax text/html 2020-11-30T06:30:29+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/uleap?rev=1606746629&do=diff uLEAP: Microrobotic Low-Cost Exploration and Asteroid Processing This project aims to begin to develop 1 cubic centimeter robots, a swarm of which can be sent to Near-Earth Asteroids (NEAs) for assorted sensing and measurement purposes. While our MEMS microrobot actuators aren't good enough to move robots very far on Earth yet, they're more than sufficient for movement in the microgravity of an asteroid. The swarm has a number of benefits over larger monolithic space probes. text/html 2021-02-20T07:51:08+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/urocket?rev=1613836268&do=diff MEMS Mico Rocket The goal of this project is to develop the necessary control system and actuators to enable autonomous millimeter-scale rockets and other aerial vehicles. The proposed rocket control surfaces consist of silicon plates connected to electrostatic inchworm motors and planar linkages that are fabricated on a silicon-on-insulator wafer. These actuators will be driven by high voltage buffers and will be controlled by an electronic system consisting of the Single Chip micro Mote, an i… text/html 2021-11-21T17:50:07+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/wafers?rev=1637545807&do=diff Wafer Ordering In the past, we've ordered custom SOI wafers 25 at a time from Silicon Valley Microelectronics (https://svmi.com/) with the following specifications: Device Layer: Diameter: 150mm ±0.5mm Thickness: 40um ±1um Type/Dopant: P/Boron Device Resistivity: 15-25 ohm-cm Crystal Orientation: <100> ±0.5 degree Front Side Finish: Polished Primary Flat Orientation: <110> ± 1 degree BOX: Thickness: 2um ±0.1um Handle Layer: Resistivity: 15-25 ohm-cm Thi… text/html 2021-02-20T08:01:25+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/walker?rev=1613836885&do=diff Quadrupedal Walker Robot This project focuses on developing a new generation of sub-centimeter MEMS-based walking robots. These robots are based on electrostatic actuators driving planar silicon linkages, all fabricated in the device layer of a silicon-on-insulator (SOI) wafer. By using electrostatic actuation, these legs have the advantage of being low power compared to other microrobot leg designs. This is key to granting the robot autonomy through low-power energy harvesting. The ultimate go… text/html 2021-02-07T19:38:31+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/webmaster?rev=1612755511&do=diff Webmaster Information The webmaster is a group member who manages the group's website software. As of 2020, it's me, Daniel Teal! Email me at dteal@berkeley.edu. Also, webmaster@bamlab.berkeley.edu forwards everything to me, or, hopefully after I graduate, whoever the current webmaster is. text/html 2020-11-30T07:13:42+00:00 Anonymous (anonymous@undisclosed.example.com) https://bamlab.berkeley.edu/wiki/wiki?rev=1606749222&do=diff How to Use This Wiki Introduction This part of the BAMLAB website is a wiki: just like Wikipedia, its pages can be created and edited by anybody in the group (once you have an account). Every wiki on the internet uses a slightly different software, so they work slightly differently. $\LaTeX$$$\int_0^\infty e^{-x}\,dx=1$$