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microfabrication
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microfabrication [2020/11/30 06:00] dteal |
microfabrication [2020/11/30 06:53] (current) dteal |
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| ===== Photoresist ===== | ===== Photoresist ===== | ||
| - | Fundamental step. Spin vs. spray. picotrack in nanolab. | + | Fundamental step. Spin vs. spray. Spin speed / thickness dependence. Types of photoresist (SU-8 microfluidics). picotrack in nanolab. |
| ===== RIE and DRIE ===== | ===== RIE and DRIE ===== | ||
| Line 26: | Line 26: | ||
| ===== Electroplating ===== | ===== Electroplating ===== | ||
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| + | ===== 2-Photon Lithography ===== | ||
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| + | Nanoscale 3D printing! | ||
| ===== Materials ===== | ===== Materials ===== | ||
| Gold contaminates. Ruthenium oxide is conductive. | Gold contaminates. Ruthenium oxide is conductive. | ||
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| + | ===== What is Microfabrication? | ||
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| + | For people who haven' | ||
microfabrication.1606744801.txt.gz · Last modified: 2020/11/30 06:00 by dteal
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