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nanolab [2021/11/18 17:34]
dteal
nanolab [2021/11/21 17:45] (current)
dteal
Line 8: Line 8:
  
   * [[asap-liftoff|asap-liftoff automatic liftoff tool]]   * [[asap-liftoff|asap-liftoff automatic liftoff tool]]
 +  * [[ast-sputter|ast-sputter sputterer]]
   * [[axcelis|axcelis UV hardbake oven]]   * [[axcelis|axcelis UV hardbake oven]]
   * [[cha|cha metal evaporator]]   * [[cha|cha metal evaporator]]
   * [[disco|disco dicing saw]]   * [[disco|disco dicing saw]]
-  * [[irscope|microscope with IR illumination to see through Si wafers]]+  * [[irscope|irscope microscope with IR illumination to see through Si wafers]] 
 +  * [[keyence|keyence microscope]]
   * [[mla150|mla150 maskless exposure tool]]   * [[mla150|mla150 maskless exposure tool]]
 +  * [[olympus|olympus 3D confocal microscope]]
   * [[optical-microscopes|optical microscopes]]   * [[optical-microscopes|optical microscopes]]
   * [[picotrack|picotrack1/2 automatic photoresist application and develop tool]]   * [[picotrack|picotrack1/2 automatic photoresist application and develop tool]]
nanolab.1637285650.txt.gz · Last modified: 2021/11/18 17:34 by dteal