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nanolab [2021/11/18 17:34] dteal |
nanolab [2021/11/21 17:45] (current) dteal |
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* [[asap-liftoff|asap-liftoff automatic liftoff tool]] | * [[asap-liftoff|asap-liftoff automatic liftoff tool]] | ||
+ | * [[ast-sputter|ast-sputter sputterer]] | ||
* [[axcelis|axcelis UV hardbake oven]] | * [[axcelis|axcelis UV hardbake oven]] | ||
* [[cha|cha metal evaporator]] | * [[cha|cha metal evaporator]] | ||
* [[disco|disco dicing saw]] | * [[disco|disco dicing saw]] | ||
* [[irscope|irscope microscope with IR illumination to see through Si wafers]] | * [[irscope|irscope microscope with IR illumination to see through Si wafers]] | ||
+ | * [[keyence|keyence microscope]] | ||
* [[mla150|mla150 maskless exposure tool]] | * [[mla150|mla150 maskless exposure tool]] | ||
+ | * [[olympus|olympus 3D confocal microscope]] | ||
* [[optical-microscopes|optical microscopes]] | * [[optical-microscopes|optical microscopes]] | ||
* [[picotrack|picotrack1/ | * [[picotrack|picotrack1/ |