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nanolab [2021/02/07 20:25] dteal |
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| ====== Marvell NanoLab ====== | ====== Marvell NanoLab ====== | ||
| - | The Marvell NanoLab is a microfabrication facility on the UC Berkeley campus. | + | The [[https:// |
| The following pages should contain information any of us working in the NanoLab could use: equipment calibration data, lists of shared lab resources (e.g., wafers), etc. | The following pages should contain information any of us working in the NanoLab could use: equipment calibration data, lists of shared lab resources (e.g., wafers), etc. | ||
| - | ===== Tool Notes, Recipes, Data ===== | + | ===== Tool Notes ===== |
| - | * [[axcelis|axcelis UV hardbake oven]] | ||
| * [[asap-liftoff|asap-liftoff automatic liftoff tool]] | * [[asap-liftoff|asap-liftoff automatic liftoff tool]] | ||
| + | * [[ast-sputter|ast-sputter sputterer]] | ||
| + | * [[axcelis|axcelis UV hardbake oven]] | ||
| * [[cha|cha metal evaporator]] | * [[cha|cha metal evaporator]] | ||
| * [[disco|disco dicing saw]] | * [[disco|disco dicing saw]] | ||
| - | * [[optical-microscopes|optical microscopes]] | + | * [[irscope|irscope microscope with IR illumination to see through Si wafers]] |
| + | * [[keyence|keyence microscope]] | ||
| * [[mla150|mla150 maskless exposure tool]] | * [[mla150|mla150 maskless exposure tool]] | ||
| + | * [[olympus|olympus 3D confocal microscope]] | ||
| + | * [[optical-microscopes|optical microscopes]] | ||
| * [[picotrack|picotrack1/ | * [[picotrack|picotrack1/ | ||
| * [[primaxx|primaxx HF vapor etcher]] | * [[primaxx|primaxx HF vapor etcher]] | ||
| * [[primeoven|primeoven HMDS priming tool]] | * [[primeoven|primeoven HMDS priming tool]] | ||
| * [[ptherm|ptherm all-purpose plasma etcher]] | * [[ptherm|ptherm all-purpose plasma etcher]] | ||
| - | * [[sts|sts2/ | + | * [[sts2|sts2 silicon DRIE etcher]] |
| + | |||
| + | ===== Recipes ===== | ||
| + | |||
| + | * [[recipe-liftoff|liftoff process]] | ||
| + | * [[sts2|DRIE silicon etch process (for sts2)]] | ||
| ===== Equipment ===== | ===== Equipment ===== | ||
| Line 23: | Line 32: | ||
| * [[wafers|list of blank wafers on our group' | * [[wafers|list of blank wafers on our group' | ||
| * [[masks|mask ordering information]] | * [[masks|mask ordering information]] | ||
| + | * [[wafers|wafer ordering information]] | ||
| ===== Processes ===== | ===== Processes ===== | ||
| Line 28: | Line 38: | ||
| Standard fabrication processes and design rules. | Standard fabrication processes and design rules. | ||
| - | 550-2-40 SOI process. | + | * [[soi-process|550-2-40 SOI process]] |
nanolab.1612758337.txt.gz · Last modified: 2021/02/07 20:25 by dteal
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