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primaxx
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primaxx [2021/12/03 01:23] dteal [Process Notes] |
primaxx [2021/12/03 01:23] (current) dteal [Process Notes] |
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| - | | 3 Feb 2021 | Daniel | Using RECIPE5 (the fastest etch available; I don't see a need for a slower one) to release SOI structures. Vary etch time as desired for given etch distance (and the tool manual recommends etch cycles of at least 5 minutes each and ideally around 10; run as many cycles as need be to achieve total etch time). Measurements imply RECIPE5 etches somewhere around 0.1um/s (the manual claims 0.13um/s, which agrees). We need a good test structure to measure this: our previous SOI-based structure didn't account for SOI footing, which can be significant occasionally. | | + | | 3 Feb 2021 | Daniel | Using RECIPE5 (the fastest etch available; I don't see a need for a slower one here) to release SOI structures. Vary etch time as desired for given etch distance (and the tool manual recommends etch cycles of at least 5 minutes each and ideally around 10; run as many cycles as need be to achieve total etch time). Measurements imply RECIPE5 etches somewhere around 0.1um/s (the manual claims 0.13um/s, which agrees). We need a good test structure to measure this: our previous SOI-based structure didn't account for SOI footing, which can be significant occasionally. | |
primaxx.txt ยท Last modified: 2021/12/03 01:23 by dteal
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