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primaxx [2021/02/07 20:22] dteal |
primaxx [2021/12/03 01:23] (current) dteal [Process Notes] |
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====== primaxx ====== | ====== primaxx ====== | ||
- | {{ map-primaxx.svg?100|NanoLab map showing primaxx location}} | + | {{ map-primaxx.svg|NanoLab map showing primaxx location}} |
[[https:// | [[https:// | ||
- | primaxx is an HF vapor etching tool. We use it to remove SiO2 from MEMS devices without stiction issues caused by using a liquid etch.x | + | primaxx is an HF vapor etching tool. We use it to remove SiO2 from MEMS devices without |
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+ | {{primaxx.jpg? | ||
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+ | ===== Process Notes ===== | ||
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+ | ^ Date ^ Person ^ Data ^ | ||
+ | | 3 Feb 2021 | Daniel | Using RECIPE5 (the fastest etch available; I don't see a need for a slower one here) to release SOI structures. Vary etch time as desired for given etch distance (and the tool manual recommends etch cycles of at least 5 minutes each and ideally around 10; run as many cycles as need be to achieve total etch time). Measurements imply RECIPE5 etches somewhere around 0.1um/s (the manual claims 0.13um/s, which agrees). We need a good test structure to measure this: our previous SOI-based structure didn't account for SOI footing, which can be significant occasionally. | |