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primaxx is an HF vapor etching tool. We use it to remove SiO2 from MEMS devices without stiction issues caused by using a liquid etch.
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primaxx is an HF vapor etching tool. We use it to remove SiO2 from MEMS devices without the stiction issues caused by using a liquid etch.
{{primaxx.jpg?0x200 |picture of primaxx tool}}
{{primaxx.jpg?0x200 |picture of primaxx tool}}
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^ Date ^ Person ^ Data ^
^ Date ^ Person ^ Data ^
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| 3 Feb 2021 | Daniel | Measurements imply RECIPE5 etches somewhere around 0.1um/s (the manual claims 0.13um/s). We need a good test structure to measure this: we suspect our previous SOI-based structure didn't account for SOI footing and gave misleading data. |
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| 3 Feb 2021 | Daniel | Using RECIPE5 (the fastest etch available; I don't see a need for a slower one here) to release SOI structures. Vary etch time as desired for given etch distance (and the tool manual recommends etch cycles of at least 5 minutes each and ideally around 10; run as many cycles as need be to achieve total etch time). Measurements imply RECIPE5 etches somewhere around 0.1um/s (the manual claims 0.13um/s, which agrees). We need a good test structure to measure this: our previous SOI-based structure didn't account for SOI footing, which can be significant occasionally. |
primaxx.1612943220.txt.gz ยท Last modified: 2021/02/09 23:47 by dteal