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--- ptherm [2021/02/10 00:14]
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+++ ptherm [2021/02/10 00:17] (current)
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 [[https://docs.google.com/document/d/1_QZZyZOIV8tVafFfs9aFPgDBELkpDLc3YAgt46aFp80/edit?usp=sharing|NanoLab ptherm manual]]
-ptherm is a multi-purpose plasma etcher. It's the NanoLab's etcher of last resort with no contamination restrictions. We often use it to etch photoresist off devices with gold because gold is not allowed in most of the other plasma etchers (gold is allowed in yes-g500, but that tool generally etches very slowly).
+ptherm is a multi-purpose plasma etcher. It's the NanoLab's etcher of last resort with virtually no contamination restrictions. We often use it to etch photoresist off devices with gold because gold is not allowed in most of the other plasma etchers (gold is allowed in yes-g500, but that tool generally etches very slowly).
 {{ptherm.jpg?0x200 |picture of ptherm tool}}

Berkeley Autonomous Microsystems Lab