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--- microfabrication [2020/11/30 05:57]
dteal created
+++ microfabrication [2020/11/30 06:53] (current)
dteal
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 ====== Microfabrication ======
+This page is an overview of microfabrication techniques used to make microrobots. It should act as a cheat sheet, listing equations, materials data, etch rates, etc., but can often link to specific nanolab tool pages.
 ===== Photolithography =====
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 ===== Photoresist =====
-Fundamental step. Spin vs. spray. picotrack in nanolab.
+Fundamental step. Spin vs. spray. Spin speed / thickness dependence. Types of photoresist (SU-8 microfluidics). picotrack in nanolab.
 ===== RIE and DRIE =====
-Anisotropic etch. Silicon vs. other materials. Etch rates.
+Anisotropic etch. Silicon vs. other materials. Etch rates. Undercut. Annealing tricks.
 ===== Sputtering =====
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 ===== Electroplating =====
+===== 2-Photon Lithography =====
+Nanoscale 3D printing!
+===== Materials =====
+Gold contaminates. Ruthenium oxide is conductive.
+===== What is Microfabrication? =====
+For people who haven't taken a MEMS or microfabrication course and/or are new to the group.

Berkeley Autonomous Microsystems Lab