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microfabrication
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microfabrication [2020/11/30 05:57] dteal created |
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| ====== Microfabrication ====== | ====== Microfabrication ====== | ||
| + | This page is an overview of microfabrication techniques used to make microrobots. It should act as a cheat sheet, listing equations, materials data, etch rates, etc., but can often link to specific nanolab tool pages. | ||
| ===== Photolithography ===== | ===== Photolithography ===== | ||
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| ===== Photoresist ===== | ===== Photoresist ===== | ||
| - | Fundamental step. Spin vs. spray. picotrack in nanolab. | + | Fundamental step. Spin vs. spray. Spin speed / thickness dependence. Types of photoresist (SU-8 microfluidics). picotrack in nanolab. |
| ===== RIE and DRIE ===== | ===== RIE and DRIE ===== | ||
| - | Anisotropic etch. Silicon vs. other materials. Etch rates. | + | Anisotropic etch. Silicon vs. other materials. Etch rates. Undercut. Annealing tricks. |
| ===== Sputtering ===== | ===== Sputtering ===== | ||
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| ===== Electroplating ===== | ===== Electroplating ===== | ||
| + | ===== 2-Photon Lithography ===== | ||
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| + | Nanoscale 3D printing! | ||
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| + | ===== Materials ===== | ||
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| + | Gold contaminates. Ruthenium oxide is conductive. | ||
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| + | ===== What is Microfabrication? | ||
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| + | For people who haven' | ||
microfabrication.1606744631.txt.gz · Last modified: 2020/11/30 05:57 by dteal
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