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mla150 [2021/02/09 18:33] dteal |
mla150 [2021/07/13 21:59] dteal |
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| | 15 Jan 2021 | Daniel | Standard 2um MiR701 on picotrack exposes best on high quality mode with 180mJ/cm2 on silicon. Don't use fast mode because it leaves streaks along the mla150 exposure lines. Exposing a full 6" wafer takes about 1.5 hours. Exposure width may vary by 0.2um across different wafers; finer characterization may reduce this uncertainty. | | | 15 Jan 2021 | Daniel | Standard 2um MiR701 on picotrack exposes best on high quality mode with 180mJ/cm2 on silicon. Don't use fast mode because it leaves streaks along the mla150 exposure lines. Exposing a full 6" wafer takes about 1.5 hours. Exposure width may vary by 0.2um across different wafers; finer characterization may reduce this uncertainty. | | ||
| | 19 Jan 2021 | Daniel | 12um AZ P4620 deposited with Wei's picotrack recipe takes about 1000mJ/cm2 on fast mode and leaves hard-to-etch film even after development. Something needs fixing. | | | 19 Jan 2021 | Daniel | 12um AZ P4620 deposited with Wei's picotrack recipe takes about 1000mJ/cm2 on fast mode and leaves hard-to-etch film even after development. Something needs fixing. | | ||
| - | + | | 9 Feb 2021 | Daniel | Standard AZ P4620 12um recipe on picotrack1 exposes best at 1000 to 1100mJ/cm2 when using fast mode (neither high quality nor high aspect ratio mode to save time). Descum on yes-g500 helps somewhat but may not be necessary (plate configuration 0A0(G*)00FF, | |
| + | | 16 Jun 2021 | Daniel | Heidelberg field service engineer tuned up tool. Now: optical autofocus is best at focus -2, pneumatic autofocus is best at focus +4, top side alignment accuracy within 300nm (spec 500nm), bottom side accuracy within 850nm (spec 1um), and required exposure dose should be 50% to 75% higher than previous recorded values. | | ||
| + | | 12 Jul 2021 | Daniel | Spun standard 2um MiR701 on picotrack after a primeoven recipe 2 on a fused silica wafer. Using pneumatic autofocus, a dose of 210mJ/cm2 and focus +4 exposed the pattern fairly well, +/- 0.2um, but did not do full dosage test. | | ||
mla150.txt · Last modified: 2021/11/30 17:36 by dteal
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