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cha
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cha is a multi-material e-beam evaporator. It holds three wafers at once in a rotating planetary mount. We often use it to deposit chromium and gold.
Process Notes
| Date | Person | Data |
|---|---|---|
| 14 Jan 2021 | Daniel | Cr evaporates at about 25mA (45% MID beam power). Au evaporates at about 85mA (65% MID beam power). |
cha.1612943506.txt.gz · Last modified: 2021/02/09 23:51 by dteal
