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cha

cha is a multi-material e-beam evaporator. It holds three wafers at once in a rotating planetary mount. We often use it to deposit chromium and gold.

Process Notes

Date	Person	Data
22 Oct 2021	Daniel	Tool power supply is replaced and is more powerful; processes should be recalibrated.
21 May 2021	Daniel	Cr evaporates at about 25mA (45% LOW beam power). Au evaporates at about 40mA (60% LOW beam power).
12 Jul 2021	Daniel	Ti evaporates at about 65mA (36% MID beam power). Pt evaporates at about 170mA (51% MID beam power). Both are extremely bright and heat the wafer significantly.
12 Jul 2021	Daniel	11nm Ti + 70nm Pt on standard 2um MiR701 makes photoresist start to flake/reticulate; more causes cracking. Liftoff works but barely.