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mems
This is an old revision of the document!
Table of Contents
MEMS
A list of common MEMS components and effects that can be used in microrobots, and theory equations.
Springs
Stress
Resonators
Microfabrication
Hinges
Heat Transfer
mems.1606745441.txt.gz · Last modified: 2020/11/30 06:10 by dteal
