NanoLab picotrack1 manual NanoLab picotrack2 manual

picotrack1 and picotrack2 are robotic photoresist application and development tools, and is the preferred photoresist deposition method for 6“ wafers and standard photoresists (svgcoat/dev6 are often used as a backup, and headway is used for other substrate sizes or specialty photoresists). Each can apply photoresist automatically on a full cassette of wafers.