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primaxx

primaxx is an HF vapor etching tool. We use it to remove SiO2 from MEMS devices without the stiction issues caused by using a liquid etch.

Process Notes

Date	Person	Data
3 Feb 2021	Daniel	Measurements imply RECIPE5 etches somewhere around 0.1um/s (the manual claims 0.13um/s). We need a good test structure to measure this: we suspect our previous SOI-based structure didn't account for SOI footing and gave misleading data.