Warning: session_write_close(): write failed: No space left on device (28) in /services/http/users/b/bamlab/wiki/doku.php on line 119

Warning: session_write_close(): Failed to write session data (files). Please verify that the current setting of session.save_path is correct (/var/lib/php/sessions) in /services/http/users/b/bamlab/wiki/doku.php on line 119
soi-process [Berkeley Autonomous Microsystems Lab]
Warning: parse_ini_file() has been disabled for security reasons in /services/http/users/b/bamlab/wiki/inc/StyleUtils.php on line 100

soi-process

This is an old revision of the document!

550-2-40um SOI Process

This is our group's standard fabrication process for robotic mechanisms (as of 2021).

soi-process.1627525600.txt.gz · Last modified: 2021/07/28 19:26 by dteal