Marvell NanoLab

The Marvell NanoLab is a shared microfabrication facility on the UC Berkeley campus. We build most of our robots here.

The following pages should contain information any of us working in the NanoLab could use: equipment calibration data, lists of shared lab resources (e.g., wafers), etc.

• asap-liftoff automatic liftoff tool
• ast-sputter sputterer
• axcelis UV hardbake oven
• cha metal evaporator
• disco dicing saw
• irscope microscope with IR illumination to see through Si wafers
• keyence microscope
• mla150 maskless exposure tool
• olympus 3D confocal microscope
• optical microscopes
• picotrack1/2 automatic photoresist application and develop tool
• primaxx HF vapor etcher
• primeoven HMDS priming tool
• ptherm all-purpose plasma etcher
• sts2 silicon DRIE etcher

• liftoff process
• DRIE silicon etch process (for sts2)

• list of blank wafers on our group's nanolab shelf, wafer ordering...
• mask ordering information
• wafer ordering information

Standard fabrication processes and design rules.

• 550-2-40 SOI process