Warning: parse_ini_file() has been disabled for security reasons in /services/http/users/b/bamlab/wiki/inc/StyleUtils.php on line 100

User Tools

Site Tools


axcelis

axcelis


NanoLab axcelis manual

axcelis is a UV hardbake oven that uses ultraviolet light and heat to hardbake photoresist extremely quickly (within about 30 seconds).

axcelis.txt · Last modified: 2021/02/07 20:04 by dteal