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primeoven
primeoven
primeoven is an HMDS vapor prime oven. It is the most reliable way to deposit HMDS in the NanoLab, and can be used if the HMDS priming in picotrack1 or the HMDS box at msink3 are insufficient.
| Date | Person | Data |
|---|---|---|
| 21 Jun 2020 | Daniel | Recipe 2 (much faster than recipe 11) seems to give sufficient adhesion of standard 2um MiR701 to fused silica wafer for liftoff process. Adhesion not quantified. |
primeoven.txt · Last modified: 2021/07/13 22:34 by dteal
