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primeoven [Berkeley Autonomous Microsystems Lab]

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primeoven

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primeoven


NanoLab primeoven manual

primeoven is an HMDS vapor prime oven. It is the most reliable way to deposit HMDS in the NanoLab, and can be used if the HMDS priming in picotrack1 or the HMDS box at msink3 are insufficient.

primeoven.1612758263.txt.gz · Last modified: 2021/02/07 20:24 by dteal

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